Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3311-3316, 1994 DOI10.1116/1.587618 Export Citation Effect of Superlattices on the Low-Energy Ion-Induced Damage in GaAs/Al(Ga)as Structures - Channeling or Diffusion Green DL, Hu EL, Stoffel NG Keywords:ETCHING-INDUCED DAMAGE;GAAS;ALGAAS Please enable JavaScript to view the comments powered by Disqus.
