Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3337-3341, 1994 DOI10.1116/1.587623 Export Citation Investigation of Modulated Radio-Frequency Plasma-Etching of GaAs Using Langmuir Probes Law VJ, Braithwaite NS, Ingram SG, Clary DC, Jones GA Keywords:HYDROGEN DISCHARGE;ION Please enable JavaScript to view the comments powered by Disqus.
