Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3378-3381, 1994 DOI10.1116/1.587516 Export Citation Radical Beam Ion-Beam Etching of InAlAs/InP Using Cl-2 Yu DG, Hu EL, Hasnain G Keywords:GAAS;INP Please enable JavaScript to view the comments powered by Disqus.
