Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3409-3412, 1994 DOI10.1116/1.587522 Export Citation 100 kv Electron-Beam Lithography Using a Schottky Field-Emission Source Koek BH, Chisholm T, Somers J, Davey J, Romijn J, Vonrun AJ Keywords:LOW-VOLTAGE;RESOLUTION Please enable JavaScript to view the comments powered by Disqus.
