Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3460-3464, 1994 DOI10.1116/1.587532 Export Citation Electron-Beam Lithography of Curved Structures with an Enhanced Vector-Scan Pattern Generator Supporting Conic-Based Primitives Vasey F, Prongue D, Rothuizen H, Vettiger P Keywords:FABRICATION;SYSTEM Please enable JavaScript to view the comments powered by Disqus.
