Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3478-3482, 1994 DOI10.1116/1.587535 Export Citation 100 kv Ghost Electron-Beam Proximity Correction on Tungsten X-Ray Masks Gesley MA, Mccord MA Keywords:LITHOGRAPHY Please enable JavaScript to view the comments powered by Disqus.
