Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3518-3522, 1994 DOI10.1116/1.587462 Export Citation Minimum Feature Sizes and Ion-Beam Profile for a Focused Ion-Beam System with Post-Objective Lens Retarding and Acceleration Mode Kieslich A, Reithmaier JP, Forchel A Keywords:IMPLANTATION;WIRES Please enable JavaScript to view the comments powered by Disqus.
