Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3561-3566, 1994 DOI10.1116/1.587471 Export Citation Design of an Atomic-Force Microscope with Interferometric Position Control Schneir J, Mcwaid TH, Alexander J, Wilfley BP Keywords:METROLOGY Please enable JavaScript to view the comments powered by Disqus.
