Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3571-3575, 1994 DOI10.1116/1.587473 Export Citation Force Probe Characterization Using Silicon 3-Dimensional Structures Formed by Focused Ion-Beam Lithography Edenfeld KM, Jarausch KF, Stark TJ, Griffis DP, Russell PE Keywords:MICROSCOPE;MICROFABRICATION;METROLOGY;TIPS Please enable JavaScript to view the comments powered by Disqus.
