Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3585-3590, 1994 DOI10.1116/1.587476 Export Citation Nanometer-Scale Dimensional Metrology for Advanced Lithography Marchman HM, Griffith JE, Guo JZ, Frackoviak J, Celler GK Keywords:SUBMICROMETER Please enable JavaScript to view the comments powered by Disqus.
