Journal of Vacuum Science & Technology B, Vol.12, No.6, 3600-3606, 1994
Diffractive Techniques for Lithographic Process Monitoring and Control
Keywords:GRATING TEST PATTERNS;X-RAY-LITHOGRAPHY;ALIGNMENT TECHNIQUE;DIMENSIONAL METROLOGY;MOIRE INTERFEROMETRY;LIGHT-SCATTERING;INTERFERENCE;PRECISION;ACCURACY;SYSTEM