Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3623-3625, 1994 DOI10.1116/1.587626 Export Citation Fabrication of Nanostructures in Algasb InAs Using Electron-Beam Lithography and Chemically Assisted Ion-Beam Etching Arafa M, Youtsey C, Grundbacher R, Adesida I, Klem J Keywords:INDIUM ARSENIDE;QUANTUM Please enable JavaScript to view the comments powered by Disqus.
