Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3643-3647, 1994 DOI10.1116/1.587631 Export Citation Multiple-Level Phase Gratings Fabricated Using Focused Ion-Beam Milling and Electron-Beam Lithography Shank SM, Chen FT, Skvarla M, Craighead HG, Cook P, Bussjager R, Haas F, Honey DA Please enable JavaScript to view the comments powered by Disqus.
