Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3648-3652, 1994 DOI10.1116/1.587632 Export Citation Patterning a 50-nm Period Grating Using Soft-X-Ray Spatial-Frequency Multiplication Wei M, Attwood DT, Gustafson TK, Anderson EH Keywords:DIMENSIONAL ELECTRON-GAS;LITHOGRAPHY Please enable JavaScript to view the comments powered by Disqus.
