Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3653-3657, 1994 DOI10.1116/1.587633 Export Citation Low-Voltage Electron-Beam Lithography on GaAs Substrates for Quantum-Wire Fabrication Steffen R, Faller F, Forchel A Keywords:HIGH-RESOLUTION;EXPOSURE Please enable JavaScript to view the comments powered by Disqus.
