Journal of Vacuum Science & Technology B, Vol.12, No.6, 3663-3667, 1994
Electron-Beam Lithography with Monolayers of Alkylthiols and Alkylsiloxanes
Keywords:SELF-ASSEMBLED MONOLAYERS;SCANNING TUNNELING MICROSCOPE;ATOMIC-FORCE MICROSCOPE;GOLD;SURFACES;FILMS;GRAPHITE;THIOLS;GAAS