Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3689-3694, 1994 DOI10.1116/1.587641 Export Citation Advances in Near-Field Holographic Grating Mask Technology Tennant DM, Dreyer KF, Feder K, Gnall RP, Koch TL, Koren U, Miller BI, Vartuli C, Young MG Keywords:ELECTRON-BEAM LITHOGRAPHY;LASERS;FIBER Please enable JavaScript to view the comments powered by Disqus.
