Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3708-3711, 1994 DOI10.1116/1.587645 Export Citation Electron-Beam Fabrication and Focused Ion-Beam Inspection of Submicron Structured Diffractive Optical-Elements Dix C, Mckee PF, Thurlow AR, Towers JR, Wood DC, Dawes NJ, Whitney JT Keywords:LITHOGRAPHY Please enable JavaScript to view the comments powered by Disqus.
