Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3746-3749, 1994 DOI10.1116/1.587435 Export Citation Laterally Coupled Distributed-Feedback Laser Fabricated with Electron-Beam Lithography and Chemically Assisted Ion-Beam Etching Tiberio RC, Chapman PF, Martin RD, Forouhar S, Lang RJ Please enable JavaScript to view the comments powered by Disqus.
