Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3809-3813, 1994 DOI10.1116/1.587446 Export Citation Quarter-Micron Lithography with a Gapped Markle-Dyson System Owen G, Borkholder D, Knorr C, Markle DA, Pease RF Please enable JavaScript to view the comments powered by Disqus.
