Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3833-3840, 1994 DOI10.1116/1.587450 Export Citation Imaging of Extreme-Ultraviolet Lithographic Masks with Programmed Substrate Defects Nguyen KB, Mizota T, Haga T, Kinoshita H, Attwood DT Keywords:RAY PROJECTION LITHOGRAPHY;REDUCTION LITHOGRAPHY;REPAIR Please enable JavaScript to view the comments powered by Disqus.
