Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3851-3856, 1994 DOI10.1116/1.587453 Export Citation Negative-Tone Deep-Ultraviolet Resists Containing Benzylic Cross-Linkers - Experimental and Simulation Studies of the Cross-Linking Process Zenk AM, Neureuther AR, Lee SM, Frechet JM Keywords:POLY-(METHYL METHACRYLATE);ELECTRON-RESIST Please enable JavaScript to view the comments powered by Disqus.
