Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3868-3873, 1994 DOI10.1116/1.587565 Export Citation Application of Real-Time Infrared-Spectroscopy to Monitoring the Kinetics of Chemically Amplified Resists Howes GR, Gamsky CJ, Taylor JW Keywords:RESIDUAL SOLVENT;AMPLIFICATION Please enable JavaScript to view the comments powered by Disqus.
