Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3936-3942, 1994 DOI10.1116/1.587578 Export Citation Comparison of Image Shortening Effects in X-Ray and Optical Lithography Dellaguardia R, Maldonado JR, Prein F, Zell T, Kluwe A, Oertel HK Please enable JavaScript to view the comments powered by Disqus.
