Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3965-3969, 1994 DOI10.1116/1.587411 Export Citation Printability of Sub-150 nm Features in X-Ray-Lithography - Theory and Experiments Hector SD, Wong VV, Smith HI, Mccord MA, Rhee KW Please enable JavaScript to view the comments powered by Disqus.
