Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 4028-4032, 1994 DOI10.1116/1.587424 Export Citation Evaluation of Temperature Rise and Thermal Distortions of X-Ray Mask for Synchrotron-Radiation Lithography Yamazaki K, Satoh F, Fujii K, Tanaka Y, Yoshihara T Please enable JavaScript to view the comments powered by Disqus.
