Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.1, 142-149, 1995 DOI10.1116/1.587972 Export Citation Optimization of Electrostatic Deflectors Szilagyi M, Cho H Keywords:SYSTEMATIC ANALYSIS;BEAM LITHOGRAPHY;SPLINE LENSES;ION;DESIGN;ABERRATIONS Please enable JavaScript to view the comments powered by Disqus.
