Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.2, 174-182, 1995 Export Citation 16-Megabit Dynamic Random-Access Memory Trench Depth Characterization Using 2-Dimensional Diffraction Analysis Hatab ZR, Mcneil JR, Naqvi SS Keywords:LEAST-SQUARES METHODS;SPECTRAL ANALYSES;GRATINGS Please enable JavaScript to view the comments powered by Disqus.
