Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.2, 366-370, 1995 DOI10.1116/1.587947 Export Citation New Optics Design Methodology Using Diffraction Grating on Spherical Mirrors for Soft-X-Ray Projection Lithography Fukuda H, Terasawa T Keywords:MULTILAYER Please enable JavaScript to view the comments powered by Disqus.
