Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.2, 670-673, 1995 DOI10.1116/1.587938 Export Citation Surface-Morphology of Epitaxial CaF2/Si(111) and Its Influence on Subsequent GaAs Epitaxy Li WD, Thundat T, Anan T, Schowalter LJ Please enable JavaScript to view the comments powered by Disqus.