Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.3, 805-811, 1995 DOI10.1116/1.587858 Export Citation Nanometer Lithography on Silicon and Hydrogenated Amorphous-Silicon with Low-Energy Electrons Kramer N, Jorritsma J, Birk H, Schonenberger C Keywords:SCANNING TUNNELING MICROSCOPE;OXIDATION;SURFACES;WATER Please enable JavaScript to view the comments powered by Disqus.
