Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.3, 826-832, 1995 DOI10.1116/1.588192 Export Citation Improved Retarding-Field Optics via Image Outside Field Hordon LS, Boyer BB, Pease RF Keywords:ELECTRON-BEAM LITHOGRAPHY;FOCUSED ION-BEAM;SYSTEM;RESOLUTION;PROBES Please enable JavaScript to view the comments powered by Disqus.
