Journal of Vacuum Science & Technology B, Vol.13, No.3, 865-875, 1995
Adsorption and Decomposition of Diethyldiethoxysilane on Silicon Surfaces - New Possibilities for SiO2 Deposition
Keywords:INDUCED THERMAL-DESORPTION;THIN-FILM GROWTH;SI(111) 7X7;KINETICS;DIETHYLSILANE;HYDROGEN;SI(100);TETRAETHOXYSILANE;H2O;SPECTROSCOPY