Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.3, 889-894, 1995 DOI10.1116/1.588201 Export Citation Estimation of Charge Buildup During Plasma Processing by Measuring Metal-Oxide Thickness Machida K, Itsumi M, Minegishi K, Arai E Keywords:INTERCONNECTIONS;DEPOSITION;DAMAGE Please enable JavaScript to view the comments powered by Disqus.
