Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.3, 1375-1379, 1995 DOI10.1116/1.587856 Export Citation High-Frequency Pattern Extraction in Digital Integrated-Circuits Using Scanning Electrostatic Force Microscopy Bridges GE, Said RA, Mittal M, Thomson DJ Keywords:RESOLUTION;PROBE;POTENTIOMETRY Please enable JavaScript to view the comments powered by Disqus.