Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.3, 1380-1385, 1995 DOI10.1116/1.587857 Export Citation Atomic-Force Microscope Lithography Using Amorphous-Silicon as a Resist and Advances in Parallel Operation Minne SC, Flueckiger P, Soh HT, Quate CF Keywords:TIP Please enable JavaScript to view the comments powered by Disqus.
