Journal of Vacuum Science & Technology B, Vol.13, No.6, 2414-2418, 1995
Study of Space-Charge Devices for Focused Ion-Beam Systems
Axisymmetric and nonaxisymmetric electron space-charge lenses and spherical aberration correctors are studied theoretically. Many interesting features of the space-charge devices are revealed by considering some simple, but physically reasonable models. It is shown that a number of simple space-charge distributions can compensate for a large range of positive spherical aberrations. Several numerical examples are presented in some detail.