Journal of Vacuum Science & Technology B, Vol.13, No.6, 2424-2427, 1995
Magnetic Funnels for Projection Electron Lithography
Electrons moving in inhomogeneous magnetic fields, which are slowly varying, behave like beads on a string. Because of this a converging magnetic funnel (MF) can be used to reduce an electron image in a way which is physically very different from a conventional lens. We analyze and numerically simulate the trajectories of electrons in a realizable ME We show that such magnetic configurations are generally capable of projecting and reducing several cmi images with features in the 0.1 mu range. Distortions are <10(-6), there is good depth of focus (greater than or equal to 1 mu m), and spot sizes (less than or equal to 20 nm) are achievable.