Journal of Vacuum Science & Technology B, Vol.14, No.2, 842-844, 1996
Voltage Contrast in Submicron Integrated-Circuits by Scanning Force Microscopy
A scanning force microscope can be used to measure a device’s internal electrical potential with high spatial and temporal resolution. We present experimental results taken with a scanning force tester constructed in our lab that offers nanometer spatial resolution and gigahertz measurement bandwidth. The results are comparable to network analyzer results.
Keywords:RESOLUTION