화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.14, No.3, 1899-1901, 1996
Porous Silicon Field-Emission Cathode Development
This article will address the development of a porous silicon cathode technology which shows promise in solving the existing problems, specifically unstable, low current density, nonreproducible and high voltage emission, encountered by other cathode technologies. Monolithic two- and three-terminal devices have been designed, manufactured, and characterized. All of these devices have resulted in stable, reproducible operating characteristics that follow the Fowler-Nordheim model. Vacuum transport of the electrons and temperature independence (to 250 degrees C) of the current-voltage characteristics have been confirmed. Appreciable emission current has been observed with macroscopic fields on the order of 10(4) V/cm, thus indicating a large submicroscopic field enhancement due to the geometrical nature of the porous silicon.