Journal of Vacuum Science & Technology B, Vol.14, No.3, 2093-2095, 1996
Emission Characteristics of Metal-Insulator-Metal Tunnel Cathodes
The tunnel cathode is one type of cold cathode. A very thin insulating film is sandwiched between two metal electrodes. The upper electrode is so thin that the electrons that tunnel through the insulating film can penetrate through it and emit to the vacuum. Emission characteristics are experimentally examined, especially the energy distribution of the emitted electrons and the emission uniformity over the active area.