화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.14, No.3, 2263-2266, 1996
Molecular-Beam Epitaxy Growth of Strontium Thiogallate
The molecular-beam epitaxy growth and characterization of cerium doped strontium thiogallate (SrGa2S4:Ce) thin film phosphors are reported. The layers were grown on GaAs, and glass/indium tin oxide/dielectric stack substrates for device fabrication. Ga2S3/Sr beam equivalent pressure ratios of 20-100 and CeCl3/Sr flux (molecules cm(-2) s(-1)) ratios of 1/20-1110 were investigated in this study. The substrate temperature was varied between 530 and 575 degrees C. A typical SrGa2S4:Ce film growth rate of 0.5 mu m/h was obtained with Sr, Ga2S3, and CeCl3 beam equivalent pressures of 2.0 x 10(-7), 1.0 x 10(-5), and 3.5 x 10(-8) Torr, respectively. Characterization of the layers’ structural and optical properties by x-ray diffraction, transmission electron microscopy, energy dispersive x-ray spectroscopy, and photoluminescence spectroscopy is presented.