Journal of Vacuum Science & Technology B, Vol.14, No.6, 4162-4166, 1996
Can Synthetic-Aperture Techniques Be Applied to Optical Lithography
This article discusses the theoretical feasibility of applying optical aperture synthesis to lithography. A technique involving the insertion of three phase gratings into a conventional projection system is described. While this approach paraxially yields imaging with doubled spatial bandwidth, aberrations introduced by the gratings are shown to be a serious limitation. Image simulations demonstrated that for very restricted pattern types, resolution down to 0.1 mu m is theoretically achievable.