In order to support next-generation devices, a super resolution technique having wide applicability and effective resolution enhancement has been proposed and some simulation results were demonstrated. It has been experimentally proven that the depth of focus of the new optics is 1.5 times wider than the modified illumination, which shows good agreement to previous simulation results. From the evaluation of the mask stage repeatability, 0.1 mu m (on mask) alignment accuracy or lens distortion between the first and second mask is acceptable for the new optics.