Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.16, No.6, 3097-3098, 1998 DOI10.1116/1.590447 Export Citation Experimental demonstration of the validity of accelerated radiation damage testing of x-ray mask materials Acosta RE, Rippstein R Keywords:IRRADIATION STABILITY;ABSORBER Please enable JavaScript to view the comments powered by Disqus.
