화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.17, No.2, 690-695, 1999
Study on improved electron emission characteristics of micropatterned diamond-like carbon films
Diamond-like carbon (DLC) films have been grown on silicon substrates by pulsed Nd-YAG laser ablation using an oscillating graphite target. Excellent field-emission characteristics of the DLC films micropatterned in 0.5 mu m spacing were obtained. When the columnar DLC structure was tested in a vertical direction, high area density of emission sites and good field-emission uniformity were observed. These findings indicate that the patterned and particle-filtered DLC film has a high potential as a cold cathode electron source for field-emission display. Also, the field-emission characteristics and electrical resistivity of the DLC film after annealing at high temperature is discussed together with the analysis of Raman spectroscopy.