화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.17, No.2, 871-874, 1999
Pulsed metal ion source by triggerless shunting arc discharge
The shunting are is an are discharge that is self-ignited in a low pressure gas without any tri source. Possible application of the shunting are to a pulsed ion source for plasma based ion implantation will be discussed. A 35 mm long titanium (Ti) wire 0.05 mm in diameter is heated by means of pulsed current from a 20 mu F capacitor (1.5-3.0 kV) in an argon environment with pressure from 2.7 to 1300 Pa. Are ignition was indicated by an abrupt decrease of the wire voltage accompanied by an abrupt increase of the are current. Ultraviolet light spectroscopy has shown that a plasma containing Ti ions and neutrals is produced by means of the are discharge. The maximum are current is about 2.1 kA with are voltage of 200-300 V. The wire temperature is estimated at about 1500 K, well below the melting point of Ti. The wire therefore remains in a solid phase during the are discharge so that the wire can be used repeatedly. Ions are extracted from the plasma by a 5 kV, 10 mu s negative high voltage pulse applied to a target. Shunting are ignition using materials other than Ti will also be discussed.