화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.17, No.4, 1390-1394, 1999
Microelectron gun integrating a point-source cathode
A structure integrating a sharp field emission tip inside a coaxial structure with an overall diameter as small as 60 mu m is described. It can emit nA electron current with a minimum kinetic energy of 50 eV. It is demonstrated that this structure behaves like an electron gun and is able to produce a low-energy, divergent and highly coherent electron beam at distances as small as 100 mu m from the tip.