화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.17, No.4, 1781-1785, 1999
Cross-sectional scanning tunneling microscopy of InAsSb/InAsP superlattices
Cross-sectional scanning tunneling microscopy (STM) has been used to characterize compositional structures in InAs0.87Sb0.13/InAs0.73P0.27 and InAs0.83Sb0.17/InAs0.60P0.40 strained-layer superlattice structures grown by metal-organic chemical vapor deposition. High-resolution STM images of the (110) cross section reveal compositional features within both the InAsxSb1-x and InAsyP1-y alloy layers oriented along the [(1) over bar 12] and [<1(1)over bar>2] directions-the same as those in which features would be observed for CuPt-B type ordered alloys, Typically one variant dominates in a given area, although occasionally the coexistence of both variants is observed. Furthermore, such features in the alloy layers appear to be correlated across heterojunction interfaces in a manner that provides support for m-V alloy ordering models which suggest that compositional order can arise from strain-induced order near the surface of an epitaxially growing crystal. Finally, atomically resolved (110) images obtained from the InAs0.87Sb0.13/InAs0.73P0.27 Sample reveal compositional features in the [112] and [<(11)over bar>2] directions, i.e,, those in which features would be observed for CuPt-A type ordering.