Journal of Vacuum Science & Technology B, Vol.17, No.6, 2791-2794, 1999
Rare earth focused ion beam implantation utilizing Er and Pr liquid alloy ion sources
We have developed procedures for the fabrication of Er-Ni and Pr-Pt liquid alloy ion sources (LAIS). Er(2+)beam with target current of similar to 100 pA and pr(2+) beams with target current of similar to 200 pA were obtained, which correspond to 50% and 80% of the total target current, respectively. Both Er-Ni and Pr-Pt alloys oxidize quickly once exposed to air. Er-Ni source lifetimes were generally larger than 200 mu A h. The source lifetimes of Pr-Pt LAISs were approximately 30 mu A h, limited by oxide contamination and wettability problems. Visible photoluminescence has been observed from Er- or Pr-doped GaN, Al2O3, and ZBLAN glass using focused ion beam direct write implantation.